发明授权
- 专利标题: Dicing tape and a method of dicing a semiconductor wafer
- 专利标题(中): 切割胶带和切割半导体晶片的方法
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申请号: US09371101申请日: 1999-08-10
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公开(公告)号: US06444310B1公开(公告)日: 2002-09-03
- 发明人: Hideo Senoo , Takeshi Kondo
- 申请人: Hideo Senoo , Takeshi Kondo
- 优先权: JP10-226009 19980810
- 主分类号: C09J702
- IPC分类号: C09J702
摘要:
A dicing tape comprising a substrate sheet and a pressure-sensitive adhesive layer formed on one surface of the substrate sheet, wherein the substrate sheet comprises an upper layer in direct contact with the pressure-sensitive adhesive layer, an intermediate layer adjacent to the upper layer, and a lower layer adjacent to the intermediate layer, and an anti-extensibility (A) of the upper layer, an anti-extensibility (B) of the intermediate layer, and an anti-extensibility (C) of the lower layer satisfy the equation (I): B
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