发明授权
US06444310B1 Dicing tape and a method of dicing a semiconductor wafer 有权
切割胶带和切割半导体晶片的方法

  • 专利标题: Dicing tape and a method of dicing a semiconductor wafer
  • 专利标题(中): 切割胶带和切割半导体晶片的方法
  • 申请号: US09371101
    申请日: 1999-08-10
  • 公开(公告)号: US06444310B1
    公开(公告)日: 2002-09-03
  • 发明人: Hideo SenooTakeshi Kondo
  • 申请人: Hideo SenooTakeshi Kondo
  • 优先权: JP10-226009 19980810
  • 主分类号: C09J702
  • IPC分类号: C09J702
Dicing tape and a method of dicing a semiconductor wafer
摘要:
A dicing tape comprising a substrate sheet and a pressure-sensitive adhesive layer formed on one surface of the substrate sheet, wherein the substrate sheet comprises an upper layer in direct contact with the pressure-sensitive adhesive layer, an intermediate layer adjacent to the upper layer, and a lower layer adjacent to the intermediate layer, and an anti-extensibility (A) of the upper layer, an anti-extensibility (B) of the intermediate layer, and an anti-extensibility (C) of the lower layer satisfy the equation (I): B
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