发明授权
- 专利标题: Surface texture measuring instrument
- 专利标题(中): 表面纹理测量仪
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申请号: US09695999申请日: 2000-10-26
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公开(公告)号: US06446496B1公开(公告)日: 2002-09-10
- 发明人: Nobuyoshi Fujii , Satoshi Ueda , Futoshi Doi
- 申请人: Nobuyoshi Fujii , Satoshi Ueda , Futoshi Doi
- 优先权: JP11-310940 19991101
- 主分类号: G01B2120
- IPC分类号: G01B2120
摘要:
A surface texture measuring instrument has a pre-load leaf spring (41, 42) for biasing a detector (10) having a skid (14) at a distal end thereof, a pre-load force controller (47) for controlling a pre-load force of the pre-load leaf spring (41, 42), and a stopper (50) for restricting movement of the detector (10) in a biasing direction when a predetermined pre-load force is applied to the detector (10) by the pre-load force controller (47). In conducting a skidless measurement, the detector (10) is locked by applying the predetermined pre-load force to the detector (10) by the pre-load force controller (47). In conducting a skid measurement, the pre-load force less than the predetermined value is applied to the detector (10) by the pre-load force controller (47).
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