发明授权
US06447375B2 Polishing method using a reconstituted dry particulate polishing composition 失效
使用重构的干燥颗粒抛光组合物的抛光方法

  • 专利标题: Polishing method using a reconstituted dry particulate polishing composition
  • 专利标题(中): 使用重构的干燥颗粒抛光组合物的抛光方法
  • 申请号: US09837506
    申请日: 2001-04-18
  • 公开(公告)号: US06447375B2
    公开(公告)日: 2002-09-10
  • 发明人: Paul J. YanceyRobert L. Rhoades
  • 申请人: Paul J. YanceyRobert L. Rhoades
  • 主分类号: B24B100
  • IPC分类号: B24B100
Polishing method using a reconstituted dry particulate polishing composition
摘要:
A polishing method uses a dry particulate solids composition that is reconstituted into an aqueous composition for delivery to a polishing apparatus. In one aspect of the invention, the dry particulate solids composition is provided in a package size that is just substantially sufficient to make a reconstituted slurry for completing the polishing of a predetermined number of work pieces. The quantity of dry particulate solids delivered to a reconstitution apparatus can be an amount appropriate for polishing one work piece or a small number of work pieces, or the system can operate in larger batches or a continuous flow mode. The reconstituted aqueous polishing solution can be monitored for physical or chemical properties, filtered, blended with other chemical mixtures, or modified in other ways prior to being used in the polishing apparatus.
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