发明授权
US06451150B2 Method of mass producing and packaging integrated optical subsystems 有权
集成光学子系统的批量生产和封装方法

  • 专利标题: Method of mass producing and packaging integrated optical subsystems
  • 专利标题(中): 集成光学子系统的批量生产和封装方法
  • 申请号: US09860550
    申请日: 2001-05-21
  • 公开(公告)号: US06451150B2
    公开(公告)日: 2002-09-17
  • 发明人: Michael R. FeldmanAlan D. Kathman
  • 申请人: Michael R. FeldmanAlan D. Kathman
  • 主分类号: B32B3118
  • IPC分类号: B32B3118
Method of mass producing and packaging integrated optical subsystems
摘要:
Mass production of integrated optical subsystems may be realized by aligning first and second plurality of dies. The aligned dies are then treated to secure them together. The secured dies are then separated to form a secured pair of dies containing at least one optical element, thus forming an integrated optical subsystem. A bonding material may be provided over at least part of the optical path of each first die, over an entire surface of the wafer or around the perimeter of each first die. Either one of the first or second dies may be provided on a wafer. Either die may contain active elements, e.g., a laser or a detector. The optical elements may be formed in the die or may be of a different material than that of the die.
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