发明授权
- 专利标题: Atmospheric electron x-ray spectrometer
- 专利标题(中): 大气电子x射线光谱仪
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申请号: US09390547申请日: 1999-09-03
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公开(公告)号: US06452177B1公开(公告)日: 2002-09-17
- 发明人: Jason E. Feldman , Thomas George , Jaroslava Z. Wilcox
- 申请人: Jason E. Feldman , Thomas George , Jaroslava Z. Wilcox
- 主分类号: H01J37256
- IPC分类号: H01J37256
摘要:
The present invention comprises an apparatus for performing in-situ elemental analyses of surfaces. The invention comprises an atmospheric electron x-ray spectrometer with an electron column which generates, accelerates, and focuses electrons in a column which is isolated from ambient pressure by a:thin, electron transparent membrane. After passing through the membrane, the electrons impinge on the sample in atmosphere to generate characteristic x-rays. An x-ray detector, shaping amplifier, and multi-channel analyzer are used for x-ray detection and signal analysis. By comparing the resultant data to known x-ray spectral signatures, the elemental composition of the surface can be determined.
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