发明授权
- 专利标题: Ferroelectric capacitor and a method for manufacturing thereof
- 专利标题(中): 铁电电容器及其制造方法
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申请号: US08812059申请日: 1997-02-20
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公开(公告)号: US06454914B1公开(公告)日: 2002-09-24
- 发明人: Takashi Nakamura
- 申请人: Takashi Nakamura
- 优先权: JP7-172142 19950707
- 主分类号: C23C1434
- IPC分类号: C23C1434
摘要:
An object of the present invention is to provide a ferroelectric capacitor which shows excellent ferroelectricity. A silicon oxidation layer 4, a lower electrode 12, a ferroelectric layer 8 and an upper electrode 15 are formed on a silicon substrate 2. The lower electrode 12 is made of palladium oxide. Also, the upper electrode 15 is made by palladium oxide, since palladium oxide prevents leakage of oxygen contained in the ferroelectric layer 8. Thus, the ferroelectric capacitor of the present invention offers excellent ferroelectricity can be realized.
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