发明授权
US06454926B1 Semiconductor plating system workpiece support having workpiece-engaging electrode with submerged conductive current transfer areas 失效
半导体电镀系统工件支架,具有工件接合电极与浸没的导电电流传输区域

Semiconductor plating system workpiece support having workpiece-engaging electrode with submerged conductive current transfer areas
摘要:
A semiconductor workpiece holder used in electroplating systems for plating metal layers, such as copper, onto a semiconductor workpiece. The workpiece holder includes electrodes which extend and are partially submerged in a liquid plating bath. The electrodes have a contact face which bears against the workpiece and conducts current therebetween. The submersible portions of the electrodes are partially covered with a dielectric layer or surface and partially covered with a conductive layer or surface. The conductive surface is preferably spaced from the contact face and placed in direct contact with the plating bath to allow diversion of some of the plating current directly between the electrode and plating bath. Associated methods are also described.
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