发明授权
- 专利标题： Dry film photoimageable compositions
- 专利标题（中）： 干膜可光成像组合物
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申请号： US09433153申请日： 1999-11-03
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公开(公告)号： US06455231B1公开(公告)日： 2002-09-24
- 发明人: James G. Shelnut
- 申请人： James G. Shelnut
- 主分类号： G03F7033
- IPC分类号： G03F7033
摘要：
Dry film resists of the invention in general comprise a photoactive component, a highly viscous or solid (at room temperature, ca. 25° C.) crosslinker component, and preferably a flexibilizing agent. Preferred dry film constructions of the invention do not require the use of a protective cover sheet due to the composition's very dry nature.
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