发明授权
- 专利标题: Pressure and temperature transducer
- 专利标题(中): 压力和温度传感器
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申请号: US09856257申请日: 2001-05-16
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公开(公告)号: US06455985B1公开(公告)日: 2002-09-24
- 发明人: Noriyuki Matsumoto
- 申请人: Noriyuki Matsumoto
- 主分类号: H01L4108
- IPC分类号: H01L4108
摘要:
A pressure- and temperature-sensitive transducer comprises a tubular housing, a resonator located within the housing and end caps closing the ends of the housing. The resonator is located in a radial plane with respect to the housing and is connected to the housing by two separate connecting regions. The housing, resonator and connecting, regions are formed from a single piece of double rotation cut quartz. The shape, dimensions and position of the connecting regions is chosen to optimize stress in an axis responsive to changes in pressure and temperature while minimizing stress in an axis responsive predominantly to pressure.