发明授权
US06460981B1 Ink jet recording head having spacer with etched pressurizing chambers and ink supply ports 有权
喷墨记录头具有带有蚀刻加压室和供墨口的间隔物

Ink jet recording head having spacer with etched pressurizing chambers and ink supply ports
摘要:
A pressurizing chamber 1 is formed as a recess by half etching of a silicon single-crystal substrate 2. A nozzle communicating hole 6 through which the pressurizing chamber 1 is connected to a nozzle opening 5 is formed as a through hole which is smaller in width than the pressurizing chamber 1. The pressurizing chamber 1 is connected to the nozzle opening 5 in the other face via the nozzle communicating hole 6 while reducing the volume of the pressurizing chamber 1 to a degree as small as possible. The silicon single-crystal substrate is used as a member constituting a spacer so that an ink drop of a reduced ink amount suitable for high density printing flies with high positioning accuracy.
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