发明授权
- 专利标题: Sputter pallet loader
- 专利标题(中): 溅射托盘装载机
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申请号: US09810854申请日: 2001-03-16
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公开(公告)号: US06461085B1公开(公告)日: 2002-10-08
- 发明人: Johann F. Adam , Evan F. Cromwell
- 申请人: Johann F. Adam , Evan F. Cromwell
- 主分类号: B65G5308
- IPC分类号: B65G5308
摘要:
A sputter pallet loading and unloading device includes in one embodiment a spindle that rotates the pallet while an arm is engaged with the spring in the pallet to open and close the spring. In another embodiment, the spindle is located adjacent an air track that moves the disk substrate over a cushion of air to the loading area of the pallet. The air pressure under the disk substrate is increased to raise the disk substrate into the loading area. Once raised into the loading area, the spring is closed, e.g., by rotating the pallet in the opposite direction. The pallet and air-track are at a small angle to allow the substrate to slide into the correct position. The simplicity of operation leads to a reduced cost and a higher throughput for this device compared to a robotic loader.
公开/授权文献
- US20020141831A1 SPUTTER PALLET LOADER 公开/授权日:2002-10-03
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