- 专利标题: Photo-detection sensor and method of manufacturing the same
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申请号: US09920720申请日: 2001-08-03
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公开(公告)号: US06462328B2公开(公告)日: 2002-10-08
- 发明人: Inao Toyoda
- 申请人: Inao Toyoda
- 优先权: JP2000-239858 20000808
- 主分类号: H01J4014
- IPC分类号: H01J4014
摘要:
In a sensor chip for forming the light receiving elements of a photo-detection sensor, p-type regions of the photodiodes are formed in a surface portion of an n-type epitaxial layer, and they are respectively contacted with electrodes. A deep n+-region is formed in the part of the n-type epitaxial layer between the adjacent p-type regions so as to reach a buried n+-region. Carriers created with the projection of light in the photodiodes are trapped by the deep n+-region (30). An aluminum film serving as a light shielding film is arranged over the part of a silicon substrate between the regions for forming the photodiodes. Thus, the photodiodes can be operated independently from each other.
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