发明授权
- 专利标题: Stacked piezoelectric device and method of fabrication thereof
- 专利标题(中): 堆叠式压电装置及其制造方法
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申请号: US09985270申请日: 2001-11-02
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公开(公告)号: US06462464B2公开(公告)日: 2002-10-08
- 发明人: Shinya Mitarai , Masayuki Kobayashi , Atsushi Murai , Akio Sugiura , Kazuhide Sato , Isao Mizuno
- 申请人: Shinya Mitarai , Masayuki Kobayashi , Atsushi Murai , Akio Sugiura , Kazuhide Sato , Isao Mizuno
- 优先权: JP2000-337807 20001106; JP2001-308808 20011004
- 主分类号: H01L41083
- IPC分类号: H01L41083
摘要:
A stacked piezoelectric device and a method of fabrication thereof includes a piezoelectric stack having a first side electrode and a second side electrode, piezoelectric layers and internal electrode layers. The piezoelectric layers and internal electrode layers have substantially the same area. The internal electrode layers have ends thereof exposed to one side of the stack. The first side electrode includes first insulative portions formed at the ends of alternate ones of the internal electrode layers and a first conductive portion formed over the first insulative portions. The second side electrode is similarly configured to form insulative portions at the other ends. The first and second insulative portions are formed of an insulative resin, while the first and second conductive portions are formed of a conductive resin. The first and second conductive portions are also formed to directly cover the ends of the internal electrode layers.