Cathode structure with getter material and diamond film, and methods of manufacture thereof

Invention Grant

US06465954B2 Cathode structure with getter material and diamond film, and methods of manufacture thereof 失效

Title translation: 具有吸气材料和金刚石膜的阴极结构及其制造方法

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Patent Title: Cathode structure with getter material and diamond film, and methods of manufacture thereof
Patent Title (中): 具有吸气材料和金刚石膜的阴极结构及其制造方法
Application No.: US09748437

Application Date: 2000-12-27
Publication No.: US06465954B2

Publication Date: 2002-10-15
Inventor: Graham Steven Kerslick , Victor Ivan Chornenky
Applicant: Graham Steven Kerslick , Victor Ivan Chornenky
Main IPC: H01J1724
IPC: H01J1724

Cathode structure with getter material and diamond film, and methods of manufacture thereof

Abstract:

A cathode structure comprising a getter material provided with a diamond film. The getter material may include zirconium, vanadium and iron. Cathode structures may have a substantially rounded configuration including a substantially straight portion. Other cathode structures may have a substantially flat portion, with the diamond film covering essentially the entire flat surface. Methods of manufacturing cathode structures may include conditioning the cathode structure by applying a voltage.

Abstract(Chinese):

一种阴极结构，包括设置有金刚石膜的吸气材料。吸气材料可以包括锆，钒和铁。阴极结构可以具有基本上圆形的构造，其包括基本上直的部分。其他阴极结构可以具有基本上平坦的部分，其中金刚石膜基本上覆盖整个平坦表面。制造阴极结构的方法可以包括通过施加电压来调节阴极结构。

Public/Granted literature

US20010015604A1 Cathode structure with getter material and diamond film, and methods of manufacture thereof Public/Granted day:2001-08-23

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