发明授权
US06466046B1 Contactor for semiconductor devices, a testing apparatus using such contactor, a testing method using such contactor, and a method of cleaning such contactor
有权
用于半导体器件的接触器，使用这种接触器的测试装置，使用这种接触器的测试方法以及清洁这种接触器的方法
- 专利标题： Contactor for semiconductor devices, a testing apparatus using such contactor, a testing method using such contactor, and a method of cleaning such contactor
- 专利标题（中）： 用于半导体器件的接触器，使用这种接触器的测试装置，使用这种接触器的测试方法以及清洁这种接触器的方法
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申请号： US09362111申请日： 1999-07-28
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公开(公告)号： US06466046B1公开(公告)日： 2002-10-15
- 发明人: Shigeyuki Maruyama , Futoshi Fukaya , Makoto Haseyama
- 申请人： Shigeyuki Maruyama , Futoshi Fukaya , Makoto Haseyama
- 优先权： JP10-361618 19981218
- 主分类号： G01R3102
- IPC分类号： G01R3102
摘要：
A contactor for semiconductor devices includes a base unit for holding a semiconductor device provided with a plurality of terminals and a wiring substrate provided with contact electrodes at positions corresponding to at least some of the terminals. The contact electrodes and the terminals are electrically connected when the wiring substrate is held on the base unit. The contactor further includes a position maintaining force applying mechanism for applying a position maintaining force between the base unit and the wiring substrate and a contact pressure applying mechanism for applying a contact pressure between the semiconductor device and the wiring substrate. The position maintaining force applying mechanism and the contact pressure applying mechanism are operable in an independent manner.
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