发明授权
US06468812B2 Method for producing a semiconductor memory device with a multiplicity of memory cells 失效
一种具有多个存储单元的半导体存储器件的制造方法

  • 专利标题: Method for producing a semiconductor memory device with a multiplicity of memory cells
  • 专利标题(中): 一种具有多个存储单元的半导体存储器件的制造方法
  • 申请号: US09826231
    申请日: 2001-04-04
  • 公开(公告)号: US06468812B2
    公开(公告)日: 2002-10-22
  • 发明人: Dietrich WidmannGeorg Tempel
  • 申请人: Dietrich WidmannGeorg Tempel
  • 优先权: EP95106101 19950424
  • 主分类号: H01L218239
  • IPC分类号: H01L218239
Method for producing a semiconductor memory device with a multiplicity of memory cells
摘要:
A method for producing a capacitor having a dielectric and first and second capacitor electrodes in a semiconductor circuit device formed on a semiconductor substrate, includes forming a trench in a layer applied to the substrate. An electrically conductive layer for the second capacitor electrode is deposited inside the trench and at least regionally conformally with side walls thereof. An auxiliary layer acting as a space-holder for the dielectric is conformally deposited inside the trench and on the electrically conductive layer for the second capacitor electrode. An electrically conductive layer for the first capacitor electrode is conformally deposited inside the trench and on the auxiliary layer. The auxiliary layer is at least partially removed to expose a hollow layer in at least a partial region between the two electrically conductive layers for the first and second capacitor electrodes. The dielectric is deposited into the exposed hollow layer between the two electrically conductive layers. A semiconductor memory device and a method for producing the device include producing the capacitor after production of the transistor and metallizing layers associated therewith for connection of the word and bit lines, in a configuration projecting upward from the plane; placing the capacitor in a trench formed inside a contact metallizing layer for the second electrode terminal of the transistor; and setting a depth of the trench to be equivalent to a layer thickness of the metallizing layer.
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