发明授权
US06469197B1 Negative photoresist composition using polymer having 1,2-diol structure and process for forming pattern using the same
失效
使用具有1,2-二醇结构的聚合物的负光致抗蚀剂组合物和使用其形成图案的方法
- 专利标题: Negative photoresist composition using polymer having 1,2-diol structure and process for forming pattern using the same
- 专利标题(中): 使用具有1,2-二醇结构的聚合物的负光致抗蚀剂组合物和使用其形成图案的方法
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申请号: US09668275申请日: 2000-09-25
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公开(公告)号: US06469197B1公开(公告)日: 2002-10-22
- 发明人: Katsumi Maeda , Shigeyuki Iwasa , Kaichiro Nakano , Etsuo Hasegawa
- 申请人: Katsumi Maeda , Shigeyuki Iwasa , Kaichiro Nakano , Etsuo Hasegawa
- 优先权: JP10-093499 19980406; JP10-288214 19981009
- 主分类号: C07C6474
- IPC分类号: C07C6474
摘要:
It is an object of the present invention to provide a negative photoresist composition for lithography, using short-wavelength light such as ArF excimer laser beam as a light source. The negative photoresist composition of the present invention is a negative photoresist composition comprising at least a polymer having a unit represented by the general formula (1) a crosslinking agent and a photo-acid generating agent, and the crosslinking agent is capable of crosslinking the polymer in the presence of an acid catalyst, whereby the polymer is insolubilized in a developer. Since the negative resist composition of the present invention is insolubilized in the developer by an action of an acid produced from the photo-acid generating agent at the exposed portion, a negative pattern can be obtained. Since the polymer has not a benzene ring, unlike a base polymer of a conventional negative resist, the polymer has high transparency to ArF excimer laser beam and also has high etching resistance because of its bridged alicyclic group.
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