发明授权
- 专利标题: Multiprobe and scanning probe microscope
- 专利标题(中): 多功能和扫描探针显微镜
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申请号: US09514096申请日: 2000-02-28
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公开(公告)号: US06469293B1公开(公告)日: 2002-10-22
- 发明人: Nobuhiro Shimizu , Hiroshi Takahashi , Yoshiharu Shirakawabe , Chiaki Yasumuro , Tadashi Arai
- 申请人: Nobuhiro Shimizu , Hiroshi Takahashi , Yoshiharu Shirakawabe , Chiaki Yasumuro , Tadashi Arai
- 优先权: JP11-070925 19990316
- 主分类号: H01J516
- IPC分类号: H01J516
摘要:
A multiprobe device is provided for a scanning probe instrument and has a plurality of individually-selectable probe members for conducting scanning probe operations. The multiprobe has a plurality of cantilever probes supported by a support member. Each of the cantilevers is individually-selectable for use in conducting scanning probe operations, and each has a different resonance frequency from the others. In a preferred embodiment, portions of the respective cantilevers that are brought into contact with a sample to conduct scanning probe operations are arranged in a substantially linear configuration. A given one of the cantilevers is selected by vibrating the multiprobe at the resonance frequency of the given cantilever.
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