发明授权
- 专利标题： Energetic-beam detection apparatus including temperature-controlled selenium detector
- 专利标题（中）： 能量束检测装置包括温度控制硒检测器
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申请号： US09822210申请日： 2001-04-02
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公开(公告)号： US06469312B2公开(公告)日： 2002-10-22
- 发明人: Toshitaka Agano
- 申请人： Toshitaka Agano
- 优先权： JP2000-098724 20000331
- 主分类号： G01T116
- IPC分类号： G01T116
摘要：
In an energetic-beam detection apparatus having a selenium detector which includes a substrate and an energetic-beam absorber being formed on the substrate and containing selenium, a temperature detecting unit detects a temperature of the selenium detector, and a temperature control unit controls the temperature of the selenium detector so that the temperature is maintained in a predetermined range when the selenium detector is in operation. Alternatively, when the temperature of the selenium detector is outside a predetermined range, an operation suppressing unit suppresses the operation of the selenium detector, or a notification unit notifies a user of the deviation of the temperature of the selenium detector from the predetermined range.
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