发明授权
US06469421B1 Piezoelectric device and production method thereof 失效
压电器件及其制造方法

Piezoelectric device and production method thereof
摘要:
A piezoelectric device having improved characteristics is accomplished by restricting degradation and variance of vibration characteristics resulting from an adhesive, and a production process is simplified. The piezoelectric device has a construction in which a ultra-fine particle layer made of substantially the same main component and having the same crystal structure as those of a piezoelectric layer is formed on a substrate, and the piezoelectric layer is formed on the ultra-fine particle layer.
信息查询
0/0