发明授权
- 专利标题: Piezoelectric device and production method thereof
- 专利标题(中): 压电器件及其制造方法
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申请号: US09426659申请日: 1999-10-25
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公开(公告)号: US06469421B1公开(公告)日: 2002-10-22
- 发明人: Mari Wakabayashi , Masataka Shinogi , Toshihiko Sakuhara
- 申请人: Mari Wakabayashi , Masataka Shinogi , Toshihiko Sakuhara
- 优先权: JP10-304417 19981026; JP11-237349 19990824
- 主分类号: H01L4108
- IPC分类号: H01L4108
摘要:
A piezoelectric device having improved characteristics is accomplished by restricting degradation and variance of vibration characteristics resulting from an adhesive, and a production process is simplified. The piezoelectric device has a construction in which a ultra-fine particle layer made of substantially the same main component and having the same crystal structure as those of a piezoelectric layer is formed on a substrate, and the piezoelectric layer is formed on the ultra-fine particle layer.
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