发明授权
- 专利标题： Microcrystalline series photovoltaic element and process for fabrication of same
- 专利标题（中）： 微晶系列光电元件及其制造方法
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申请号： US09758345申请日： 2001-01-12
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公开(公告)号： US06472248B2公开(公告)日： 2002-10-29
- 发明人: Atsushi Shiozaki , Masafumi Sano , Toshimitsu Kariya , Takaharu Kondo , Makoto Higashikawa , Koichi Matsuda
- 申请人： Atsushi Shiozaki , Masafumi Sano , Toshimitsu Kariya , Takaharu Kondo , Makoto Higashikawa , Koichi Matsuda
- 优先权： JP11-0199846 19990704; JP2000-175984 20000612
- 主分类号： H01L2100
- IPC分类号： H01L2100
摘要：
A photovoltaic element having a stacked structure comprising a first semiconductor layer containing no crystalline phase, a second semiconductor layer containing approximately spherical microcrystalline phases, and a third semiconductor layer containing pillar microcrystalline phases which are stacked in this order, wherein said spherical microcrystalline phases of said second semiconductor layer on the side of said third semiconductor layer have an average size which is greater than that of said spherical microcrystalline phases of said second semiconductor layer on the side of said first semiconductor layer.