发明授权
- 专利标题: Microactuator
- 专利标题(中): 微型制动器
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申请号: US08082956申请日: 1993-06-29
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公开(公告)号: US06472794B1公开(公告)日: 2002-10-29
- 发明人: Narito Shibaike , Satoshi Matsumoto
- 申请人: Narito Shibaike , Satoshi Matsumoto
- 优先权: JP4-183351 19920710; JP4-331533 19921211; JP4-347984 19921228; JP5-017251 19930204
- 主分类号: H01L4108
- IPC分类号: H01L4108
摘要:
The present invention relates to a microactuator that can be produced by utilizing the IC fabrication processes such as etching, lithography or the like and that can be used as a micropositioner in a multi probe head for scanning probe microscopy and a pickup head for recording and reproducing equipment. The microactuator comprises a plurality of electrodes arranged around the circumference of a circle, a ring-like displacement plate located inside said electrodes, beams which support said displacement plate elastically at one ends and at the same time are fixed at the other ends to a point located towards the inside of said displacement plate on a substrate and a voltage supply means to apply voltages to said electrodes in order for said electrodes to attract said displacement plate electrostatically. An extremely small, long life and high reliability microactuator that is excellent in mass-producibility and capable of high precision positioning can be realized.
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