发明授权
- 专利标题： Flexibly suspended gas distribution manifold for plasma chamber
- 专利标题（中）： 用于等离子体室的柔性悬浮气体分配歧管
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申请号： US09488612申请日： 2000-01-20
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公开(公告)号： US06477980B1公开(公告)日： 2002-11-12
- 发明人: John M. White , Ernst Keller , Wendell T. Blonigan
- 申请人： John M. White , Ernst Keller , Wendell T. Blonigan
- 主分类号： C23C1600
- IPC分类号： C23C1600
摘要：
A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by flexible side walls. The flexible suspension minimizes mechanical stress due to thermal expansion of the gas distribution plate. In another aspect, the suspension provides thermal isolation between the gas distribution plate and other components of the chamber.
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