A capacitive distance sensor adapted to measure a distance between an object and the sensor device, which is suitable for determining surface configuration of an object includes a objective electrode, moving device for the objective electrode and a detecting means of moving distance of the objective electrode. The moving device is controlled depending on the signal from the objective electrode to position it in a predetermined range of clearance. The distance between the object and the sensor device is calculated based on the signals from the detecting means and the objective electrode.