发明授权
- 专利标题： Fluid delivery ring and methods for making and implementing the same
- 专利标题（中）： 流体输送环及其制造和实施方法
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申请号： US09672173申请日： 2000-09-27
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公开(公告)号： US06481447B1公开(公告)日： 2002-11-19
- 发明人: Stephen M. Smith , Randolph E. Treur
- 申请人： Stephen M. Smith , Randolph E. Treur
- 主分类号： B08B302
- IPC分类号： B08B302
摘要：
A fluid delivery module for use in preparing a substrate is provided. The fluid delivery module includes a process bowl designed to contain a substrate to be prepared. The process bowl has a bottom wall and a sidewall. The fluid delivery module further includes a fluid delivery ring configured to be attached to the sidewall of the process bowl. The fluid delivery ring includes a plurality of inlet and outlet pairs. Each of the plurality of inlet and outlet pairs is defined in the fluid ring and is designed to receive a respective supply tube. Each respective supply tube has an end that terminates at each of the outlets of the fluid delivery ring and is configured to direct fluid onto a surface of the substrate.