A pump comprises a first substrate having a fluid inlet port for receiving a fluid, a fluid outlet port for discharging the fluid, a first pumping section for pumping the fluid from the fluid inlet port to the fluid outlet port, a first inlet valve section disposed between the fluid inlet port and the first pumping section, and a first outlet valve section disposed between the fluid outlet port and the first pumping section. A second substrate has a second pumping section, a second inlet valve section, and a second outlet valve section. An intermediate substrate is disposed between the first and second substrates to form a first fluid feeding path and a second fluid feeding path for feeding the fluid pumped by the first and second pumping sections. The first fluid feeding path extends from the first inlet valve section to the first outlet valve section through the first pumping section. The second fluid feeding path extends from the second inlet valve section to the second outlet valve section through the second pumping section. The intermediate substrate has a first connection port connecting the first and second inlet valve sections in fluid communication with the fluid inlet port and a second connection port connecting the first and second outlet valve sections in fluid communication with the fluid outlet port.