Invention Grant
- Patent Title: Method of providing differential frequency adjusts in a thin film bulk acoustic resonator (FBAR) filter and apparatus embodying the method
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Application No.: US09799149Application Date: 2001-03-05
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Publication No.: US06483229B2Publication Date: 2002-11-19
- Inventor: John D. Larson, III , Paul D. Bradley , Richard C. Ruby
- Applicant: John D. Larson, III , Paul D. Bradley , Richard C. Ruby
- Main IPC: H01L4104
- IPC: H01L4104

Abstract:
A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. An FBAR is fabricated on a substrate by mass loading piezoelectric (PZ) layer between two electrodes. For a substrate having multiple resonators, only selected resonator is mass loaded to provide resonators having different resonance frequencies on the same substrate.
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