- 专利标题: Method of providing differential frequency adjusts in a thin film bulk acoustic resonator (FBAR) filter and apparatus embodying the method
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申请号: US09799149申请日: 2001-03-05
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公开(公告)号: US06483229B2公开(公告)日: 2002-11-19
- 发明人: John D. Larson, III , Paul D. Bradley , Richard C. Ruby
- 申请人: John D. Larson, III , Paul D. Bradley , Richard C. Ruby
- 主分类号: H01L4104
- IPC分类号: H01L4104
摘要:
A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. An FBAR is fabricated on a substrate by mass loading piezoelectric (PZ) layer between two electrodes. For a substrate having multiple resonators, only selected resonator is mass loaded to provide resonators having different resonance frequencies on the same substrate.
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