发明授权
- 专利标题： Vacuum processing apparatus
- 专利标题（中）： 真空加工设备
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申请号： US09782193申请日： 2001-02-14
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公开(公告)号： US06484415B2公开(公告)日： 2002-11-26
- 发明人: Shigekazu Kato , Kouji Nishihata , Tsunehiko Tsubone , Atsushi Itou
- 申请人： Shigekazu Kato , Kouji Nishihata , Tsunehiko Tsubone , Atsushi Itou
- 优先权： JP2-225321 19900829
- 主分类号： F26B1330
- IPC分类号： F26B1330
摘要：
A wafer conveyor system for used in a vacuum processing apparatus wherein the conveyor structure is provided with a transfer structure and a robot apparatus is arranged on the transfer structure. The robot provides for rotation of the wafer horizontally from a position in a cassette to an opposite postion of the cassette.