发明授权
- 专利标题: Spiral inductor semiconducting device with grounding strips and conducting vias
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申请号: US09753284申请日: 2001-01-02
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公开(公告)号: US06489663B2公开(公告)日: 2002-12-03
- 发明人: Arne W. Ballantine , Robert A. Groves , Michael B. Rice , Anthony K. Stamper
- 申请人: Arne W. Ballantine , Robert A. Groves , Michael B. Rice , Anthony K. Stamper
- 主分类号: H01L2900
- IPC分类号: H01L2900
摘要:
An integrated semiconducting device comprises a semiconducting substrate, a plurality of grounding strips disposed above the substrate in a lower metal level of the semiconducting device, an inductor positioned in an upper metal level of the semiconducting device, and a plurality of conducting vias connected to and extending away from the grounding strips towards the inductor. The inductor, conducting via, ground strips structure forms a Faraday cage that acts as a shield against electromagnetic radiation. The number and placement of the conductive vias are adjustable and can be optimized based on the relative importance of maximizing the quality factor Q of the inductor or minimizing the capacitance between the inductor and ground.