Invention Grant
US06489664B2 Process for fabricating integrated multi-crystal silicon resistors in MOS technology, and integrated MOS device comprising multi-crystal silicon resistors
有权
在MOS技术中制造集成的多晶硅电阻器的方法以及包括多晶硅电阻器的集成MOS器件
- Patent Title: Process for fabricating integrated multi-crystal silicon resistors in MOS technology, and integrated MOS device comprising multi-crystal silicon resistors
- Patent Title (中): 在MOS技术中制造集成的多晶硅电阻器的方法以及包括多晶硅电阻器的集成MOS器件
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Application No.: US09866074Application Date: 2001-05-24
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Publication No.: US06489664B2Publication Date: 2002-12-03
- Inventor: Danilo Re , Massimo Monselice , Paola Maria Granatieri
- Applicant: Danilo Re , Massimo Monselice , Paola Maria Granatieri
- Priority: EP97830663 19971212
- Main IPC: H01L298605
- IPC: H01L298605

Abstract:
A fabrication process and an integrated MOS device having multi-crystal silicon resisters are described. The process includes depositing a multi-crystal silicon layer on top of a single-crystal silicon body; forming silicon oxide regions on top of the multi-crystal silicon layer in zones where resistors are to be produced; depositing a metal silicide layer on top of and in contact with the multi-crystal silicon layer so as to form a double conductive layer; and shaping the conductive layer to form gate regions, of MOS transistors. During etching of the double conductive layer, the metal silicide layer on top of the silicon oxide regions is removed and the silicon oxide regions form masking regions for the multi-crystal silicon underneath, so as to form resistive regions having a greater resistivity than the gate regions.
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