发明授权
- 专利标题: Polymers, resist compositions and patterning process
- 专利标题(中): 聚合物,抗蚀剂组合物和图案化工艺
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申请号: US09842113申请日: 2001-04-26
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公开(公告)号: US06492090B2公开(公告)日: 2002-12-10
- 发明人: Tsunehiro Nishi , Seiichiro Tachibana , Mutsuo Nakashima , Takeshi Kinsho , Takeru Watanabe , Koji Hasegawa , Jun Hatakeyama
- 申请人: Tsunehiro Nishi , Seiichiro Tachibana , Mutsuo Nakashima , Takeshi Kinsho , Takeru Watanabe , Koji Hasegawa , Jun Hatakeyama
- 优先权: JP2000-129054 20000428
- 主分类号: G03F7038
- IPC分类号: G03F7038
摘要:
A polymer comprising units of formulas (1) and (2) and having a Mw of 1,000-500,000 is provided. R1 is H, CH3 or CH2CO2R3, R2 is H, CH3 or CO2R3, R3 is alkyl, R4 is H, alkyl, alkoxyalkyl or acyl, R5 is alkyl or aryl, Y is a divalent hydrocarbon group which may contain a hetero atom and which forms a ring with the carbon atom, Z is a trivalent hydrocarbon group, k is 0 or 1, and W is —O— or —(NR)— wherein R is H or alkyl. A resist composition comprising the polymer as a base resin is sensitive to high-energy radiation, has excellent sensitivity, resolution, and etching resistance, and lends itself to micropatterning with electron beams or deep-UV rays.
公开/授权文献
- US20010051315A1 Polymers, resist compositions and patterning process 公开/授权日:2001-12-13
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