发明授权
- 专利标题: Vaporizing apparatus
- 专利标题(中): 蒸发装置
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申请号: US09594790申请日: 2000-06-16
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公开(公告)号: US06494957B1公开(公告)日: 2002-12-17
- 发明人: Isao Suzuki
- 申请人: Isao Suzuki
- 优先权: JP11-172855 19990618
- 主分类号: C23C1600
- IPC分类号: C23C1600
摘要:
The vaporizing apparatus comprises a disk portion in which a plurality of sheet disks are provided in a stacked configuration, with a top disk being provided on a top of the sheet disks. Each of the sheet disks has a thin sheetlike form and includes a through-hole at a central portion thereof. A shaft extends through these openings and supports the sheet disks and the top disk. The disk portion is accommodated in a chamber formed on a base. A liquid is introduced through a flow passage into the openings of the sheet disks of the disk portion in the chamber. Heaters are provided within the base. A piezoactuator is provided so as to bias the disk portion in the chamber from a side of the top disk. The piezoactuator adjusts the gaps between the disks and opening/closing of the flow passage.
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