发明授权
- 专利标题: System and method for probe mechanism planarization
- 专利标题(中): 探针机构平面化的系统和方法
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申请号: US09712669申请日: 2000-11-14
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公开(公告)号: US06496001B1公开(公告)日: 2002-12-17
- 发明人: Dennis Barringer , Donald W. Porter , Roger R. Schmidt , Wade H. White
- 申请人: Dennis Barringer , Donald W. Porter , Roger R. Schmidt , Wade H. White
- 主分类号: G01R3102
- IPC分类号: G01R3102
摘要:
An exemplary embodiment is a method and apparatus for planarization. The planarization tool has a base which provides the support for the planarization tool. The base has a support hinge mounted on it along with dampening posts and rest posts which support a pivot plate hinged to the support hinge. A pressure assembly is mounted to the pivot plate by retention hardware. The pressure assembly loads a device under test board assembly that is mounted to the pressure assembly with the retention hardware.
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