发明授权
US06496001B1 System and method for probe mechanism planarization 失效
探针机构平面化的系统和方法

System and method for probe mechanism planarization
摘要:
An exemplary embodiment is a method and apparatus for planarization. The planarization tool has a base which provides the support for the planarization tool. The base has a support hinge mounted on it along with dampening posts and rest posts which support a pivot plate hinged to the support hinge. A pressure assembly is mounted to the pivot plate by retention hardware. The pressure assembly loads a device under test board assembly that is mounted to the pressure assembly with the retention hardware.
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