- 专利标题： Electrostatic actuator, method of producing electrostatic actuator, micropump, recording head, ink jet recording apparatus, ink cartridge, and method of producing recording head
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申请号： US09922010申请日： 2001-08-03
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公开(公告)号： US06497474B2公开(公告)日： 2002-12-24
- 发明人: Mitsugu Irinoda , Yukito Satoh , Junichi Azumi , Kaihei Isshiki
- 申请人： Mitsugu Irinoda , Yukito Satoh , Junichi Azumi , Kaihei Isshiki
- 优先权： JP2000-237825 20000804; JP2001-078851 20010319; JP2001-179412 20010614
- 主分类号： B41J204
- IPC分类号： B41J204
摘要：
An electrostatic actuator includes a diaphragm caused to vibrate by electrostatic force, an electrode substrate opposing the diaphragm, an electrode formed on the electrode substrate so as to oppose said diaphragm with a gap being formed between the electrode and the diaphragm, an anti-corrosive thin film formed on said diaphragm, and diaphragm deflection prevention means preventing the diaphragm from deflecting.
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