发明授权
- 专利标题： Piezoelectric/electrostrictive device having mutually opposing end surfaces and method of manufacturing the same
- 专利标题（中）： 具有相互相对的端面的压电/电致伸缩器件及其制造方法
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申请号： US09524042申请日： 2000-03-13
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公开(公告)号： US06498419B1公开(公告)日： 2002-12-24
- 发明人: Yukihisa Takeuchi , Tsutomu Nanataki , Koji Ikeda , Koji Kimura , Kazuyoshi Shibata
- 申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Ikeda , Koji Kimura , Kazuyoshi Shibata
- 优先权： JP11-281522 19991001; JP11-307844 19991028; JP11-326195 19991116; JP11-371967 19991227; JP2000-013576 20000121; JP2000-015123 20000124; JP2000-056434 20000301
- 主分类号： H01L4108
- IPC分类号： H01L4108
摘要：
A piezoelectric/electrostrictive device comprises a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. A piezoelectric/electrostrictive element is arranged on at least one thin plate section of the pair of thin plate sections. A hole is formed by the inner walls of the pair of thin plate sections, the movable section and the fixation section. A central portion of the movable section is cut off to form mutually opposing end surfaces in the movable section.
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