发明授权
- 专利标题: Apparatus for rotary cathode electroplating with wireless power transfer
- 专利标题(中): 具有无线电力传输的旋转阴极电镀设备
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申请号: US09715724申请日: 2000-11-17
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公开(公告)号: US06500316B1公开(公告)日: 2002-12-31
- 发明人: Joseph J. Fatula, Jr. , Robert W. Hitzfeld , Richard Contreras , Guillermo Prada-Silva , Andrew Chiu , Rainer Schieferstein
- 申请人: Joseph J. Fatula, Jr. , Robert W. Hitzfeld , Richard Contreras , Guillermo Prada-Silva , Andrew Chiu , Rainer Schieferstein
- 主分类号: C25D1700
- IPC分类号: C25D1700
摘要:
An apparatus for rotary cathode electroplating having a head assembly, a substrate/thief assembly having a thieving ring which includes a number of individually chargeable segments, and a secondary induction assembly including a secondary core and a secondary winding. A motor drives the substrate/thief assembly to rotate relative to the head assembly. A controller directs electrical charge to each of the individually chargeable segments of the thieving ring. An electrical storage device stores electrical energy which is to be supplied to the controller. A charging apparatus induces a magnetic flux which induces an alternating current in the secondary winding of the secondary induction assembly. A converter converts the induced alternating current to direct current, which is then stored on the electrical storage device.