A method is provided for producing a thin-film photovoltaic device which has a rear electrode including a transparent conductive rear layer and a light-reflective metallic layer. In forming the light-reflective metallic layer, a first plasma region including fine particles of zinc oxide and a second plasma region including fine particles of silver are formed in a chamber at a sputtering gas pressure of about 0.1 to about 0.27 Pa. Then, the substrate is passed over the first and second plasma regions formed in the chamber to form a bonding layer comprising the zinc oxide and a light-reflective metallic layer comprising the silver, thereby providing the rear electrode having the transparent conductive rear layer, the bonding layer and the light-reflective metallic layer.