发明授权
US06500702B2 Method for manufacturing thin film transistor liquid crystal display 有权
制造薄膜晶体管液晶显示器的方法

  • 专利标题: Method for manufacturing thin film transistor liquid crystal display
  • 专利标题(中): 制造薄膜晶体管液晶显示器的方法
  • 申请号: US09736905
    申请日: 2000-12-13
  • 公开(公告)号: US06500702B2
    公开(公告)日: 2002-12-31
  • 发明人: Deuk Su LeeJung Mok Jun
  • 申请人: Deuk Su LeeJung Mok Jun
  • 优先权: KR99-61662 19991224
  • 主分类号: H01L2184
  • IPC分类号: H01L2184
Method for manufacturing thin film transistor liquid crystal display
摘要:
The present invention discloses a method for manufacturing thin film transistor liquid crystal display including the following steps so as to form simultaneously a via hole for contacting a drain electrode and a pixel electrode mutually and the channel of thin film transistor: forming sequentially gate insulation layer, amorphous silicon layer for channel and doped semiconductor layer for ohmic contact, and metal layer for source/drain electrode on the back substrate where the gate electrode and the storage capacitor electrode have been formed; patterning the metal layer for source/drain electrode and the doped semiconductor layer for ohmic contact through a second photolithograph process so that the source electrode, the drain electrode, and the ohmic contacts thereof may be formed; forming a passivation layer on the back substrate where the source electrode and the drain electrode have been formed; patterning the passivation layer, the amorphous silicon layer for channel, and the gate insulation layer through a third photolithograph process so that a part of the drain electrode and the back substrate portion between the storage capacitor electrode and the thin film transistor may be exposed.
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