发明授权
- 专利标题: Method to reduce the damages of copper lines
- 专利标题(中): 减少铜线损坏的方法
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申请号: US09838209申请日: 2001-04-20
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公开(公告)号: US06500753B2公开(公告)日: 2002-12-31
- 发明人: Syun-Ming Jang , Ying-Ho Chen , Jih-Churng Twu , Chen-Hua Yu
- 申请人: Syun-Ming Jang , Ying-Ho Chen , Jih-Churng Twu , Chen-Hua Yu
- 主分类号: H01L218238
- IPC分类号: H01L218238
摘要:
The invention teaches the addition of copper lines, these copper lines to be added to isolated copper lines or to selected copper lines within a collection of copper lines. The invention also teaches the addition of copper end caps to isolated copper lines or to selected copper lines within a collection of copper lines. The invention further teaches the widening of copper lines for isolated copper lines or selected copper lines within a collection of copper lines.
公开/授权文献
- US20010027010A1 Method to reduce the damages of copper lines 公开/授权日:2001-10-04