发明授权
US06500961B2 Lactone compounds having alicyclic structure and their manufacturing method
有权
具有脂环结构的内酯化合物及其制造方法
- 专利标题: Lactone compounds having alicyclic structure and their manufacturing method
- 专利标题(中): 具有脂环结构的内酯化合物及其制造方法
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申请号: US09867656申请日: 2001-05-31
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公开(公告)号: US06500961B2公开(公告)日: 2002-12-31
- 发明人: Takeshi Kinsho , Koji Hasegawa , Takeru Watanabe , Tsunehiro Nishi , Mutsuo Nakashima , Seiichiro Tachibana , Jun Hatakeyama
- 申请人: Takeshi Kinsho , Koji Hasegawa , Takeru Watanabe , Tsunehiro Nishi , Mutsuo Nakashima , Seiichiro Tachibana , Jun Hatakeyama
- 优先权: JP2000-164553 20000601
- 主分类号: C07D30720
- IPC分类号: C07D30720
摘要:
Lactone compounds of formula (1) are useful as monomers to form base resins for use in chemically amplified resist compositions adapted for micropatterning lithography. R1 is H or C1-6 alkyl, R2 is H or an acyl or alkoxycarbonyl group of 1-15 carbon atoms which may be substituted with halogen atoms, Z is a divalent C1-15 organic group which forms a lactone ring with the carbonyloxy group, k is 0 or 1, and m is an integer from 0 to 5.
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