发明授权
US06500971B2 Ester compounds having alicyclic and oxirane structures and method for preparing the same
有权
具有脂环和环氧乙烷结构的酯化合物及其制备方法
- 专利标题： Ester compounds having alicyclic and oxirane structures and method for preparing the same
- 专利标题（中）： 具有脂环和环氧乙烷结构的酯化合物及其制备方法
-
申请号： US09873193申请日： 2001-06-05
-
公开(公告)号： US06500971B2公开(公告)日： 2002-12-31
- 发明人: Takeru Watanabe , Takeshi Kinsho , Koji Hasegawa , Tsunehiro Nishi , Mutsuo Nakashima , Seiichiro Tachibana , Jun Hatakeyama
- 申请人： Takeru Watanabe , Takeshi Kinsho , Koji Hasegawa , Tsunehiro Nishi , Mutsuo Nakashima , Seiichiro Tachibana , Jun Hatakeyama
- 优先权： JP2000-169357 20000606
- 主分类号： C07D30316
- IPC分类号： C07D30316
摘要：
An ester compound of formula (1) is provided. R1 is H or methyl, R2 is tertiary C4-20 alkyl, and k=0 or 1. A resist composition comprising as the base resin a polymer resulting from the ester compound is sensitive to high-energy radiation, has excellent sensitivity, resolution, etching resistance and substrate adhesion, and is suited for micropatterning using electron beams or deep-UV.
公开/授权文献
信息查询
