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US06504287B2 Multilayered piezoelectric/electrostrictive ceramic actuator 失效
多层压电/电致伸缩陶瓷致动器

Multilayered piezoelectric/electrostrictive ceramic actuator
Abstract:
The present invention relates a manufacturing method for a multilayered piezoelectric/electrostrictive ceramic actuator by a sintering process at low temperature. The present invention makes feasible a high quality image and high speed printing, as large displacement and high speed actuation are feasible because it can get greater displacement and driving speed, even with small variation in driving voltage, because of piezoelectric/electrostrictive layer and upper electrode being alternately heaped to produce a multilayer structure.
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