- 专利标题: Dynamic quantity sensor having movable and fixed electrodes with high rigidity
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申请号: US09897016申请日: 2001-07-03
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公开(公告)号: US06508126B2公开(公告)日: 2003-01-21
- 发明人: Minekazu Sakai , Seiki Aoyama , Hirotsugu Funato
- 申请人: Minekazu Sakai , Seiki Aoyama , Hirotsugu Funato
- 优先权: JP2000-220923 20000721; JP2001-105161 20010403
- 主分类号: G01P15125
- IPC分类号: G01P15125
摘要:
A dynamic quantity sensor has a weigh portion that is supported by a base portion to be displaced by a dynamic quantity, a movable electrode protruding from the weigh portion, and a fixed electrode protruding from the base portion and defining a detection interval with the movable electrode. The detection interval changes in response to displacement of the weight portion for detecting the dynamic quantity. Each of the movable electrode and the fixed electrode has a tapered plane shape with a width that decreases from a root portion toward a tip portion thereof.
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