发明授权
- 专利标题: Halogen addition for improved adhesion of CVD copper to barrier
- 专利标题(中): 卤素添加用于改善CVD铜对屏障的附着力
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申请号: US09824455申请日: 2001-04-02
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公开(公告)号: US06509266B1公开(公告)日: 2003-01-21
- 发明人: Ralph J. Ciotti , Scott Edward Beck , Eugene Joseph Karwacki, Jr.
- 申请人: Ralph J. Ciotti , Scott Edward Beck , Eugene Joseph Karwacki, Jr.
- 主分类号: H01L2144
- IPC分类号: H01L2144
摘要:
A process is described for depositing a copper film on a substrate surface by chemical vapor deposition of a copper precursor. The process includes treating a diffusion barrier layer surface and/or a deposited film with an adhesion-promoting agent and annealing the copper film to the substrate. Suitable adhesion-promoting agents include, e.g., organic halides, such as methylene chloride, diatomic chlorine, diatomic bromine, diatomic iodine, HCl, HBr and Hl. Processes of the invention provide copper-based films, wherein a texture of the copper-based films is predominantly (111). Such films provide substrates having enhanced adhesion between the diffusion barrier layer underlying the (111) film and the copper overlying the (111) film.