发明授权
- 专利标题： Methods using dry powder deposition apparatuses
- 专利标题（中）： 使用干粉沉积设备的方法
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申请号： US09531639申请日： 2000-03-21
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公开(公告)号： US06511712B1公开(公告)日： 2003-01-28
- 发明人: Eugene Samuel Poliniak , Hoi Cheong Steve Sun , Nitin Vithalbhai Desai , Nalin Kumar , William Ronald Roach , Lawrence Harrison Hammer , Peter David Southgate , Bawa Singh , Howard Christopher Rivenburg , Peter Zanzucchi , David Keller , Dominic Stephen Rosati
- 申请人： Eugene Samuel Poliniak , Hoi Cheong Steve Sun , Nitin Vithalbhai Desai , Nalin Kumar , William Ronald Roach , Lawrence Harrison Hammer , Peter David Southgate , Bawa Singh , Howard Christopher Rivenburg , Peter Zanzucchi , David Keller , Dominic Stephen Rosati
- 主分类号： B05D104
- IPC分类号： B05D104
摘要：
Provided is a method using a dry deposition apparatus for depositing grains on a substrate comprising: an electrostatic chuck having one or more collection zones, wherein the substrate is layered on the chuck for processing; a charged grain delivery apparatus for directing charged grains for electrostatic deposition on the substrate at the locations of the collection zones; and an optical detection device for quantifying the amount of grains deposited.