- 专利标题: Flexible semiconductor device support with integrated thermoelectric cooler and method for making same
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申请号: US09790811申请日: 2001-02-23
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公开(公告)号: US06512291B2公开(公告)日: 2003-01-28
- 发明人: Mindaugas F. Dautartas , Joseph M. Freund , George J. Przybylek
- 申请人: Mindaugas F. Dautartas , Joseph M. Freund , George J. Przybylek
- 主分类号: H01L2310
- IPC分类号: H01L2310
摘要:
A method and apparatus are disclosed for supporting semiconductor devices on a flexible support which includes one or more thermoelectric cooling devices. The thermoelectric cooling devices, which include at least one pair of positively-doped and negatively-doped elements electrically coupled together, are positioned between a pair of flex panels. Each panel has connector sites at which connectors such as solder balls are located. The thermoelectric cooling devices may be arranged between the panels to create two or more device support areas having different temperature regimes. The thermoelectric cooling devices may be connected to the panels by placing the panels, connectors and thermoelectric cooling devices in a reflow chamber, exposing them to a reducing atmosphere, and heating to a temperature sufficient to reflow the connectors.
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