发明授权
- 专利标题： Anti-vibration system for exposure apparatus
- 专利标题（中）： 曝光装置的防振系统
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申请号： US09300521申请日： 1999-04-28
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公开(公告)号： US06512571B2公开(公告)日： 2003-01-28
- 发明人: Hiromichi Hara
- 申请人： Hiromichi Hara
- 优先权： JP10-134240 19980430
- 主分类号： G03B2742
- IPC分类号： G03B2742
摘要：
An anti-vibration system with air dampers of high natural frequency, in a compact space. A pair of air dampers are disposed with their driving directions opposed to each other, and inside pressures of these dampers are variably controlled so as set the natural vibration frequency.
公开/授权文献
- US20020012108A1 ANTI-VIBRATION SYSTEM FOR EXPOSURE APPARATUS 公开/授权日：2002-01-31