发明授权
- 专利标题: Micro-electromechanical device, liquid discharge head, and method of manufacture therefor
- 专利标题(中): 微机电装置,排液头及其制造方法
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申请号: US09577979申请日: 2000-05-25
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公开(公告)号: US06513911B1公开(公告)日: 2003-02-04
- 发明人: Teruo Ozaki , Akihiro Yamanaka , Yoshiyuki Imanaka , Masahiko Kubota
- 申请人: Teruo Ozaki , Akihiro Yamanaka , Yoshiyuki Imanaka , Masahiko Kubota
- 优先权: JP11-158646 19990604
- 主分类号: B41J205
- IPC分类号: B41J205
摘要:
A micro-electromechanical device comprises a movable member having a fixedly supporting portion and movable portion, and a substrate for having the movable member which is supported in a state having a specific gap with the substrate. For this device, a metallic layer which provides the gap for the movable portion is covered by the fixedly supporting portion of the movable member, and remains to be used as a wiring layer. The wiring layer is electrically connected with a plurality of wiring provided for the substrate. With the structure, thus arranged, the electric resistance is made significantly small. The electrical efficiency is enhanced accordingly. Also, the apparatus that adopts this device is made smaller, and the costs of manufacture thereof is made lower as well.
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