发明授权
US06514665B1 Additives for improving post exposure delay stability of photoresist
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用于改善光刻胶曝光延迟稳定性的添加剂
- 专利标题: Additives for improving post exposure delay stability of photoresist
- 专利标题(中): 用于改善光刻胶曝光延迟稳定性的添加剂
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申请号: US09651809申请日: 2000-08-30
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公开(公告)号: US06514665B1公开(公告)日: 2003-02-04
- 发明人: Jae Chang Jung , Keun Kyu Kong , Geun Su Lee , Ki Ho Baik
- 申请人: Jae Chang Jung , Keun Kyu Kong , Geun Su Lee , Ki Ho Baik
- 优先权: KR99-36605 19990831
- 主分类号: G03F7004
- IPC分类号: G03F7004
摘要:
The present invention relates to a compound that is useful as an additive for improving post exposure delay stability in a photoresist composition, and a photoresist composition containing the same. In particular, it has been found that a compound of the formula: where A, R1 to R3 are defined herein, can efficiently prevent or reduce the phenomenon of a lack of pattern formation and T-topping resulting from post exposure delay (PED) by reducing influences of environmental amine compounds. PED is a disadvantage of alicyclic compounds used in the lithography process using light sources such as KrF, ArF, VUV, E-beam, ion beam and EUV.
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