- 专利标题: Array of ultrasound transducers
-
申请号: US09768564申请日: 2001-01-24
-
公开(公告)号: US06515402B2公开(公告)日: 2003-02-04
- 发明人: Mareike Klee , Tilman Schlenker , Olaf Dannappel , Hans-Peter Loebl , Georg Schmitz , John Fraser
- 申请人: Mareike Klee , Tilman Schlenker , Olaf Dannappel , Hans-Peter Loebl , Georg Schmitz , John Fraser
- 主分类号: H01L4108
- IPC分类号: H01L4108
摘要:
The invention relates to an array of ultrasound transducers which each comprise a substrate (1), a membrane (2), a first electrode (4), a piezoelectric layer (5), and a second electrode (6), wherein the substrate (1) comprises at least one opening (3) which adjoins the membrane (2) at one side, while the piezoelectric layer (5) has a high piezoelectric coupling coefficient k and is textured. The invention further relates to an ultrasound transducer and to a method of manufacturing an array of ultrasound transducers.
公开/授权文献
- US20020105250A1 Array of ultrasound transducers 公开/授权日:2002-08-08
信息查询